负责实时监控设备和工厂吞吐量，确定消除单个设备类型以及整个工厂的等待浪费时间，解决出现的瓶颈问题的工业工程师；
负责确定物料放行计划，并管理工厂调度/派遣系统，以适应客户订单和/或工厂状态的变化的生产控制人员；
负责机队匹配和管理，尽量减少或消除为关键工艺步骤提供特定设备集的需要，从而简化整个工厂的调度过程的设备工程师；
负责最小化设备停机时间，MTTR(平均维修时间)，和设备恢复生产状态就绪所需的晶圆使用量的维护工程师；
负责从底层车间的泵、冷却器、排气系统和其他复杂子系统收集数据并将其集成到生产数据管理基础设施中，以供越来越多的分析应用程序使用的厂务工程师
负责补充关键工艺和测量设备的内置传感和控制能力，以支持先进的过程开发的传感器集成专家
……等等
EDAApplications and Benefits for Smart
Manufacturing:Introduction to a New Series
With the adoption of the latest SEMI EDA (EquipmentData Acquisition, also known as Interface A) standards accelerating significantly over the past 18 months, it is time to highlight the applications across the industry that make the best use of these standards, and the specific manufacturing benefits that result.
The articles in this series are not simply suggestions of what one could do by leveraging the performance, flexibility, and architectural features of these standards. Rather, they are leading edge application-specific mini-case studies derived from actual production experience, and as such, can provide genuine guidance for those companies just now contemplating potential pilot projects or even factory-wide deployments of the EDA standards.
Another important aspect of this series is that the applications described affect a broad range of stakeholders in a semiconductor manufacturing company. These include, of course, the process control engineers and statistical modeling support staff responsible for the Fault Detection and Classification (FDC) implementation strategy in all modern wafer fabs, since this application has consistently been the initial consumer of thehigh-density, precisely framed equipment/process data and associated context information provided through the EDA interfaces.
However, other direct beneficiaries of EDA-enabled applications extend well beyond this group, and include:
Industrial engineers responsible for monitoring equipment and factory throughput in real-time, identifying opportunities to eliminate wait time waste in individual equipment types aswell as the overall factory, and addressing bottlenecks as they shift and emerge;
Production control staff responsible for determining the material release schedule and managing the factory scheduling/dispatching systems to accommodate changes in customer orders and/or factory status;
Equipment engineers responsible for fleet matching and management to minimize or eliminate the need to dedicate certain equipment sets for critical process steps and thereby simplify the overall factory scheduling process;
Maintenance engineers responsible forminimizing equipment downtime, MTTR (mean time to repair), and test wafer usage required to bring equipment back to production-ready state;
Facilities engineers responsible for collecting and integrating sub-fab data from pumps, chillers, exhaust systems, and other complex subsystems into the production data management infrastructure for use by a growing range of analysis applications;
Sensor integration specialists responsible for supplementing the built-in sensing and control capabilities of critical processand measurement equipment to support advanced process development…
… and the list goeson.
Despite their diversity, these application articles all share a common profile, which includes a statement of the manufacturing problem addressed; a description of the major solution components required; a discussion of how the solution leverages specific, unique characteristics of the EDA standards; and finally, identification of the key ROI (return oninvestment) factors that are impacted by the solution. In addition, where available, example ROI calculations will be provided so that the readers can adapt them to their own company environments to quantify the potential benefit of implementing a comparable application solution.
From the above description, you may be tempted to assume that the series focuses mostly on the careabouts of semiconductor manufacturing companies (IDMs and foundries)… but this is not the case. Since the performance of the highlighted applications depends heavily on the“quality” (for lack of a better term) of the equipment interfaces supplying the data, the equipment suppliers have a major role to play in achieving the promised benefit. Specifically, the metadata models (specified by SEMI E120,E125, and E164) that define the parameters, states, events, exceptions, and other data available from the equipment and structure this information for external access essentially form the data collection “contract” between the equipment suppliers and their factory customers. For this reason, the detailed requirements for this aspect of the EDA implementation must be carefully specified and negotiated. This will not happen overnight, as the implications for future equipment design are significant.
As a number of industry experts have already expressed, it is an exciting time to be in the semiconductor industry, regardless of your position along the value chain. For those involved in thecollection and use of equipment data to optimize factory performance, we hope you will find the coming series of articles especially useful in formulating you own company's EDA implementation roadmap.
Topics: EDA/Interface A, Smart Manufacturing/Industry 4.0, EDA in Smart Manufacturing Series
Posted by Alan Weber: VicePresident, New Product InnovationsonDec 19, 2017 11:40:00 AM
