300mm半导体制造设备的SEMI标准可能是一个难以理解的信息负担，更不用说实施了。
GEM标准包含超过450页的文档:E4、E5、E30、E37、E37.1、E172、E173。
300mm标准增加了另外280页: E39、E40、E87、E90、E94、E116、E157、E148。
EDA标准又增加了480页: E120、E125、E128、E132、E134、E138、E164。
那是超过1200页的标准文件，充满了需求和实现信息。
除此之外，GEM和EDA以不同的方式从设备收集数据。有关这些差异的更多信息，请参阅我们关于数据收集的一篇文章。
在没有SDK的情况下实现这些标准中定义的需求将是一项非常勇敢的任务。即使使用这些标准的SDK，当您真正想要做的只是让设备自动化时，这有相当多的工作要做.
此外，为了使你们的设备能够顺利地集成到每个fab中并被接受，正确地实现这些标准是非常重要的。不同的晶圆厂使用标准略有不同或有额外的要求。这需要经验。
GEM300和EDA标准的实现是一个非常大的负担
这意味着什么呢?
EDA标准的主要任务之一是定义设备的层次模型，以及根据标准中定义的模式，在XML中可生成哪些数据。创建初始模型并随着设备的发展保持其最新是一项冗长乏味的任务。此外，该模型必须符合E164标准(这一部分有超过10页的需求) 。查看我们关于一致性测试的博客文章。CCF在后台根据您的CCF编程生成一个符合E164的EDA模型，从而为您完成这一任务。更多的详细信息，请参阅我们的博客文章CCF动态模型创建。同时，CCF还为您构建GEM接口模型
此外，CCF使用CimetrixCIMConnect和CIM300产品，完全符合GEM和300mm，这些产品已经成功地部署在世界各地的每一家300mm工厂的多个类型的设备上。
1200页的标准，完全的实现，不需要额外的努力。这就是它的意义。
把那头驴变成山羊，用CCF。
要了解更多关于CCF的信息，请访问我们网站上的CIMControlFramework页面！
CCF Provides Fully Implemented GEM300 and EDA Interfaces
What does this mean and why shouldI care?
The SEMI standards for 300mm Semiconductor Manufacturing Equipment can be an overwhelming burden of information to understand, let alone implement.
The GEM standards comprise over 450 pages of documentation: E4, E5, E30, E37, E37.1, E172, E173.
The 300mm standards add another 280 pages: E39, E40, E87, E90, E94, E116, E157, E148.
And the EDA standards pile on an additional 480 pages: E120, E125, E128, E132, E134, E138, E164.
That's over 1200 pages of standards documents filled with requirements and implementation information.
On top of that GEM and EDA collect data differently from the equipment. See a post we did on data collection for more information on those differences.
Implementing the requirements defined in those standards without an SDK would be a very brave undertaking. Even with SDKs for the standards, it would be a fair amount of work, when all you really want to do is get your equipment automated.
In addition, it is very important that those standards be implemented correctly in order for your equipment to be smoothly integrated and accepted into each fab. Different fabs use the standards slightly differently or have additional requirements. This requires experience.
GEM300 and EDA standards implementation is a very large burden.
One of the large tasks for the EDA standards is defining a hierarchical model of the equipment and what data it can produce in XML per the schemas defined in the standards. Creating the initial model and keeping it up to date as the equipment evolves is a tedious task. In addition, that model must be conformant to the E164 standard (which has over 10 pages of requirements on its own). See our blog post on conformance testing. CCF does this for you, producing an E164 compliant EDA model in the background based on your CCF programming. See our blog post on CCF dynamic model creation further details. CCF also builds the GEM interface model for you at the same time.
Further, CCF is completely GEM compliant and 300mm compliant, using the Cimetrix CIMConnect and CIM300 products which have been successfully deployed in every 300mm fab around the world on many differente quipment types.
Twelve hundred pages of standards, compliantly implemented, at no additional effort. That is what this means.
Turn that donkey into a goat and use CCF.
To learn more about CCF, visit the CIMControlFramework page on our website!
Topics: SECS/GEM, Equipment Control-Software Products,Cimetrix Products
Posted by Bill Grey: Distinguished Software Engineer on Feb 15, 2017 1:00:00 PM
